Mar 29, 2024  
2021-2022 Undergraduate Catalog 
    
2021-2022 Undergraduate Catalog [ARCHIVED CATALOG]

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EGN 446 - Micro Electromechanical Systems


Topics include microfabrication, principles of electromechanical energy conversion and transduction, sensors and actuators, materials used for MEMS and their thermal, electrical, and mechanical properties. Standard MEMS fabrication processes and MEMS design. Lecture 3 hrs., Lab 1 hr.

Prerequisite(s): EGN 260  or ELE 262 ELE 217 .
Co-requisite(s):
Credits: 3

Course Typically Offered:
Course Type: General Engineering



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