EGN 446 - Micro Electromechanical Systems

Topics include microfabrication, principles of electromechanical energy conversion and transduction, sensors and actuators, materials used for MEMS and their thermal, electrical, and mechanical properties. Standard MEMS fabrication processes and MEMS design. Lecture 3 hrs., Lab 1 hr.

Prerequisite(s): EGN 260 or ELE 262, ELE 217.
Co-requisite(s):
Credits: 3

Course Typically Offered:
Course Type: General Engineering